Memory storage device with heating element

ABSTRACT

A memory storage device is provided that includes a storage cell having a changeable magnetic region. The changeable magnetic region includes a material having a magnetization state that is responsive to a change in temperature. The memory storage device also includes a heating element. The heating element is proximate to the storage cell for selectively changing the temperature of the changeable magnetic region of said storage cell. By heating the storage cell via the heating element, as opposed to heating the storage cell by directly applying current thereto, more flexibility is provided in the manufacture of the storage cells.

STATEMENT OF GOVERNMENT RIGHTS

This invention was made with Government support under grant contractnumbers MDA972-96-C-Z0030 and MDA972-99-C-0009 awarded by the DefenseAdvanced Research Projects Agency (DARPA) of the United StatesDepartment of Defense. The Government has certain rights in thisinvention.

FIELD OF INVENTION

The present invention generally relates to memory arrays of storagecells, and more particularly to a memory storage device with a heatingelement.

BACKGROUND OF THE INVENTION

Magnetic Random Access Memory (MRAM) technology utilizes storage cells,for example, magnetic tunnel junctions (MTJs), which generally each haveat least two magnetic regions or layers with an electrically insulatingbarrier layer between them. The data storage mechanism relies on therelative orientation of the magnetization of the two layers, and on theability to discern this orientation through electrodes attached to theselayers. For background, reference is made to U.S. Pat. Nos. 5,650,958and 5,640,343 issued to Gallagher et al. on Jul. 22, 1997 and Jun. 17,1997, respectively, which are incorporated herein by reference.

Typically, each storage cell includes a magnetically changeable(reversible) or “free” region and a proximate magnetically referenced“fixed” region arranged into a MTJ. A storage cell can be written byreversing the free region magnetization using applied bidirectionalelectrical and resultant magnetic stimuli via its respective bit lineand word line. The storage cell can later be read by measuring theresultant tunneling resistance between the bit line and word line, whichassumes one of two values depending on the relative orientation of themagnetization of the free region with respect to the fixed region.

MRAM arrays typically include an array of data storage cellsrespectively positioned at intersections of word lines and bit lines.When writing storage cells, it is desirable to write only selectedstorage cells in the array, without affecting other non-selected cells.However, the magnetic fields generated from the bit and word line duringwriting can disturb the magnetization state of adjacent non-selectedcells, thereby reducing reliability of the array. In addition, themagnetic state of a cell can be affected by the magnetization state ofadjacent cells, especially in a dense array.

Accordingly, a need exists for improving the write selectivity of memorystorage cells within a memory array.

SUMMARY OF THE INVENTION

The present invention provides techniques for increasing the writeselectivity of memory storage cells and reducing the types of errorsdescribed above.

In one aspect of the invention, the invention provides a memory storagedevice. The storage device includes a storage cell having a changeablemagnetic region. The changeable magnetic region includes a materialhaving a magnetization state that is responsive to a change intemperature. The memory storage device also includes a heating element.The heating element is proximate to the storage cell for selectivelychanging the temperature of the changeable magnetic region of saidstorage cell.

In a preferred embodiment, the storage cell of the memory storage deviceincludes a magnetic tunnel junction, and the changeable magnetic regionis a reversible magnetic region having a magnetization state which canbe reversed by applying thereto a selected magnetic field. Thereversible magnetic region includes a material having a magnetizationstate that is responsive to a change in the temperature thereof.

Preferably, the magnetic tunnel junction further includes at least onefixed magnetic region having a magnetization state which cannot bechanged or reversed by applying the selected magnetic field to the fixedmagnetic region.

According to a preferred embodiment of the invention, selective heatingis applied to the storage cell by passing an electric current throughthe heating element. The memory storage device can further include anelectrically conductive terminal that is capable of receiving theelectric current passing through the heating element.

As will be understood, it may be desirable to maintain the aforesaidreversible magnetic region at the compensation temperature to maintainstored data in the storage cell.

In another aspect of the invention, a memory array is provided. Thememory array includes two or more memory storage devices. At least oneof the memory storage devices includes a storage cell having a bit lineand word line associated therewith. The storage cell includes achangeable magnetic region that includes a material having amagnetization state that is responsive to a change in temperaturethereof. The memory storage device also includes a heating elementproximate to the storage cell for selectively changing the temperatureof said changeable magnetic region of said storage cell.

In another aspect of the invention, an integrated circuit is provided.The integrated circuit includes at least one memory storage device asset forth above and described further herein.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 schematically illustrates a magnetic memory array of MRAMmagnetic storage cells suitable for use with the present invention;

FIG. 2 schematically illustrates an ideal hysteresis loop for areversible magnetic region of a MRAM storage cell;

FIGS. 3( a) and 3(b) schematically illustrate a geometry for addressinga MRAM storage cell;

FIG. 4 graphically illustrates the magnetic selectivity of an idealmagnetic memory cell for selectively switching the magnetic state of thememory;

FIG. 5( a) schematically illustrates a memory storage device, formed inaccordance with one aspect of the present invention;

FIG. 5( b) schematically illustrates a memory storage device, formed inaccordance with another aspect of the present invention;

FIGS. 6( a)-6(c) schematically illustrate the temperature dependence ofthe coercive field of selected ferrimagnetic materials suitable for usein the magnetic tunnel junction, according to the present invention.

DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS OF THE INVENTION

MRAM arrays include an array of data storage cells 50 typicallypositioned at the intersections of wordlines 1, 2, 3 and bitlines 4, 5,6, as shown in FIG. 1. In a preferred form, each cell includes amagnetically changeable (reversible) or “free” region, and a proximate,magnetically referenced or “fixed” region, arranged into a MTJ device.The term “fixed region” is used broadly herein to denote any type ofregion which, in cooperation with the free or changeable region, resultsin a detectable state of the device as a whole.

Generally, the principle underlying storage of data in such cells is theability to change, and even reverse, the relative orientation of themagnetization of the free regions with respect to the correspondingfixed regions by changing the direction of magnetization along the easyaxis (“EA”) of the free region, and the ability to thereafter read thisrelative orientation difference. More particularly, a storage cell iswritten by reversing the free region magnetization using appliedbi-directional electrical and resultant magnetic stimuli via itsrespective bit line and word line.

The storage cell is later read by measuring the resultant tunnelingresistance between the bit line and word line, which assumes one of twovalues depending on the relative orientation of the magnetization of thefree region with respect to the fixed region. If the free region ismodeled as a simple elemental magnet having a direction of magnetizationwhich is free to rotate but with a strong preference for aligning ineither direction along its easy axis (+EA or −EA), and if the referenceregion is a similar elemental magnet but having a direction ofmagnetization fixed in the +EA direction, then two states, and thereforetwo possible tunneling resistance values, are defined for the cell:aligned or parallel (+EA/+EA) and anti-aligned or anti-parallel(−EA/+EA).

An ideal hysteresis loop characterizing the tunnel junction resistancewith respect to the applied EA field is shown in FIG. 2. The resistanceof the tunnel junction can assume one of two distinct values with noapplied stimulus in region 20, i.e., there is a lack of sensitivity ofresistance to the applied field below the easy axis flipping fieldstrength +/−H_(c) in region 20.

For example, if the applied easy axis field exceeds +/−H_(c), then thecell is coerced into its respective high resistance (anti-alignedmagnetization of the free region with respect to the fixed region) orlow resistance (aligned magnetization of the free region with respect tothe fixed region) state. Thus, in operation as a memory device, thestorage cell can be read by measuring the tunneling resistance to inferthe magnetization state of the free layer with respect to the fixedlayer.

The ideal hysteresis loop, shown schematically in FIG. 2, is desirablesince the resistance has one of two distinct possibilities, and there isa lack of sensitivity of measured resistance to the applied field belowthe flipping field strength H_(c). However, in a practical device, suchideal behavior often fails to exist, thereby raising many problems.

FIGS. 3( a) and 3(b) illustrate a geometry typically proposed foraddressing the storage cell 50. The bias current indicated by the arrowthrough the cell 50 flows from bit line 5 to word line 2, as shown inFIG. 3( a), while the magnetic field-generating current flows in eitherbit line 5 or word line 2 as indicated by the arrows as shown in FIG. 3(b).

Although the ability to cleanly write the bit (corresponding to thereversal of the free layer in the storage cell geometry discussed above)is important, there is another important aspect for the successfuloperation of the MRAM array. Specifically, it is desirable to choose,for writing data, only selected memory cells in the array, withoutdisturbing any of the other non-selected cells during this writeprocess.

FIG. 4 graphically illustrates the magnetic selectivity of an idealmagnetic memory cell (a so-called “astroid plot” or Stoner-Wolfarthastroid) and selective switching of cells in an array. The solid line 40traces the boundaries of stability for a single idealized particle formagnetization pointing either left or right as a function of appliedmagnetic field. The axes of the plot correspond to the easy (H_(easy))and hard (H_(hard)) axis fields (i.e., parallel or perpendicular to thedirection preferred by the crystalline anisotropy).

Inside the astroid boundary 40, there are two stable states and,depending on magnetic history, either can be achieved. However, outsidethe astroid, there is only one state of magnetization which is parallelto the applied magnetic field. Because of the shape of the astroid, themagnetic field may be used to isolate a particular data storage cell forwriting.

As shown by the dotted lines forming a box 41 in FIG. 4, easy and hardaxis fields (generated by currents through the bit and word linesintersecting at a selected cell), each of amplitude H_(w), force thestorage cell into the right-pointing state. Neighboring storage cells,e.g., those either on the same word line or same bit line, having eitherinsufficient easy or hard axis fields within their astroid boundariesare not expected to change state. Thus, in theory, a specific selecteddevice can be written by simultaneously applying current to both theword and bit lines.

The above procedure for writing requires very tight manufacturingtolerances. Specifically, in practice, the solid line 40 of the astroidcurve expands into a band when considering the range of stability for apopulation of junctions. If this band becomes too large, then there isno combination of easy and hard axis fields which will definitely switchany desired storage cell, without also switching other unselectedstorage cells by mistake. Thus, reliability becomes a problem.

Further, the magnetic field at a storage cell is affected by not onlythe fields from the bit and word lines, but also to the magnetic stateof the storage cells around it. This effect, when consideredstatistically, further reduces write selectivity.

Generally, the preferred embodiment of the present invention provides amemory array utilizing a memory storage device design in which a writeselectivity of a storage cell, e.g., a MTJ, or group of storage cellsmay be selectively increased by heating only the selected cell(s),thereby reducing the likelihood of unintentionally writing adjacentcells, and improving the quality of the switching characteristics of theselected cell(s).

With reference to FIG. 1, an exemplary memory array includes a set ofelectrically conductive lines that function as parallel word lines 1, 2,and 3 in a horizontal plane, and a set of electrically conductive linesthat function as parallel bit lines 4, 5, and 6 in another horizontalplane. The bit lines are preferably oriented in a different direction,e.g., at right angles to the word lines, so that the two sets of linesform intersecting regions when viewed from above.

A storage cell 50, for example, a MTJ device, which is shown in greaterdetail in FIGS. 5( a) and 5(b) with regard to the present invention, islocated at a plurality of intersecting regions of a word line and a bitline, vertically spaced between the lines. Three word lines and threebit lines are illustrated in FIG. 1, but the number of lines wouldtypically be much larger.

The storage cell 50 will be described in more detail with reference toFIGS. 5( a) and 5(b). Storage cell 50, e.g., a MTJ device, is preferablyformed of a number of vertically stacked regions or layers. Inparticular, cell 50 comprises both a fixed layer 52 and a changeable or“free” layer 51 separated by an electrically insulating tunnel barrierlayer 53. As will be understood from the above referenced patents issuedto Gallagher et al., the magnetization of fixed layer 52 is oriented inthe plane of the layer but is fixed so that it may not be rotated orreversed in the presence of applied external magnetic fields generatedby write currents through bit line 5 and word line 2. By contrast, themagnetization of free layer 51 can be rotated (or reversed) in the planeof layer 51 relative to the fixed magnetization of layer 52. The amountof tunneling current that flows perpendicularly through magnetic layers51 and 52 and through the intermediate tunneling insulating layer 53,e.g., Al₂O₃, depends on the relative magnetization directions ofmagnetic layers 51 and 52.

As will be understood, the free layer 51 is fabricated to have apreferred axis for the direction of magnetization called the easy axis.There are two possible stable reversible directions of magnetization ofthe free layer 51 along this easy axis which define two stable states ofthe storage cell 50.

During a memory array operation, the cell 50 can be written by changingthe magnetization of the free layer 51. The magnetization of the freelayer can be changed, for example, when a sufficiently large current ispassed through both a word line 2 and a bit line 5 of the storage cell50. The field generated by the combined magnetic fields at theintersection of the word and bit lines will rotate the magnetization ofthe free layer 51 of the single particular cell 50 located at theintersection of the energized word and bit lines. Alternatively, thefield generated by current passing through a single word or bit linealone may be sufficient to rotate the magnetization of the free layer 51of the cell 50 when the cell 50 is selected as further described below.The current levels are designed so that the field produced exceeds theswitching field of the free layer 51. The storage cell 50 is designed sothat the field required to switch the magnetization of the fixed layer52 is much greater than the field required to switch the free layer 51.Another example of changing the magnetization of the free layer is viaspin injection, wherein the spin state of the electrons of currentpassing through the cell operatively affects the magnetization of thefree layer.

The state of the storage cell 50 may be determined, for example, bymeasuring the resistance of the storage cell 50 when a read current,much smaller than the write current, is passed perpendicularly throughthe cell. The field generated by this read current is preferablynegligible and therefore does not switch the magnetic state of storagecell 50.

In U.S. patent application Ser. No. 09/708,253 entitled,“Thermally-Assisted Magnetic Random Access Memory (MRAM),” filed Nov. 8,2000, incorporated herein by reference, the inventors of the instantapplication disclosed the use of heat to help selectively write an MTJdevice within a memory device. In the previously filed invention, apulse of current is applied by a voltage source such that the currentpasses through a selected cell to directly heat the reversible magneticlayer of the selected cell. This heating serves to isolate the device tobe addressed, thus improving write selectivity and improving the qualityof the switching characteristics.

It has been found that when the selected cell 50 is heated by apredetermined amount, e.g., 50-100° C., the magnetic field required toswitch that specific cell can be reduced. If the magnetic field isapplied simultaneously, or at least before the layer 51 recools, onlythe heated cell will be written, provided that the magnetic fieldstrength is both larger than the coercivity of the heated cell andsmaller than the coercivity of the unheated cell.

The present invention provides a memory storage device 58 that removesthe heating function from the storage cell 50, thereby removingconstraints on the choice of storage cells, e.g., tunnel barriers havinga certain range of resistance. In addition, the memory storage device ofthe invention can remove possible limits on the available densities ofthe memory array.

As shown in FIGS. 5( a) and 5(b), the memory storage device 58 of theinvention includes a heating element 56 and a storage cell 50 asdescribed above. The heating element 56 is separate from the storagecell 50 and preferably comprises a conductive layer having a lowresistance, e.g., from about 1 to about 100 ohms, in order to permitsufficient heat to be generated by a given electric current passingthrough the heating element 56. Suitable materials for forming theheating element layer 56 include, for example, tungsten, copper,aluminum, and doped silicon.

The heating element 56 is heated by an external energy source (notshown). The energy source can be, for example, a voltage or currentsource, or a heat source. As shown in FIGS. 5( a) and 5(b), electriccurrent can pass through the word line 2 into the heating element 56.Although other configurations are possible, it is preferred that theheating element 56 be heated by current passing from an adjacent wordline.

In a preferred embodiment, the memory storage device 58 of the inventionalso includes an output terminal 54. The output terminal 54 can beformed of any conventional material, such as metal, suitable forcarrying current. It is preferred that the conductive terminal 54 not bemagnetic. The output terminal 54 can accept current passing through theheating element 56 and serve as a return to an external voltage orcurrent source that provided the current.

FIGS. 5( a) and 5(b) show two preferred arrangements of the elementswithin the memory device 58, and the coupling of the memory device 58 tothe word lines 2 and bit lines 5 in a memory array. As shown in FIGS. 5(a) and 5(b), in a preferred arrangement of the memory array, the heatingelement 56 is adjacent to the word line 2. However, other arrangementsare possible. For example, the word and bit lines could be reversed.Regardless of the specific arrangement of the memory array or the memorystorage device 58 within the array, the heating element 56 should beproximate to the storage cell 50 such that the heat from the heatingelement 56 can be substantially localized to the selected storage cell50, thereby raising the temperature of the storage cell 50 without alsoheating adjacent storage cells.

Due to heating of the storage cell 50 as described above, the coercivefield is reduced in the storage cell 50. Therefore, a much smallermagnetic field can be applied to reverse the direction of magnetizationin the free layer 51. In contrast, during the read process, a smallercurrent is typically used, whereby the reading operation leaves thestored magnetization state intact. As will be understood, such thermallyassisted switching ensures that when the cell is not activated (e.g.,heated), the cold-state coercivity is comparatively large and thusunintentional switching is minimized.

In a preferred embodiment, the free layer 51 of storage cell 50 includesferrimagnetic material. As is well known, ferrimagnetic materials ofteninclude a plurality (e.g., two) of sub-lattices with opposingmagnetization. However, contrary to the case of an anti-ferromagnet,because the two sub-lattices in a ferrimagnet are not identical, thephysical properties of a ferrimagnet are quite different from those ofan anti-ferromagnet. Ferrimagnetism is usually observed in rare earthalloys such as those indicated in FIGS. 6 (a)-(c).

Examples of ferrimagnetic materials include alloys of Fe and at leastone of Gd, Tb, and Dy, e.g., Gd₂₃Fe₇₇, Gd₂₄Fe₇₆, Tb₁₉Fe₈₁, Tb₂₁Fe₇₉,Dy₁₇Fe₈₃, and Dy₂₁Fe₇₉. Other examples of ferrimagnetic materialsinclude alloys of Co and Sm.

Usually, the moments of the two sub-lattices of ferrimagnetic materialsare unequal so that there is a net macroscopic moment. Themagnetizations of the sub-lattices have different temperature dependenceso that there can be a temperature at which they exactly compensate forone another. At the compensation temperature (T_(comp)), the coercivityis very high as there is no net moment to be rotated by an externallyapplied magnetic field. Small changes in temperature close to thecompensation point can lead to dramatic changes in coercivity, as shownin FIGS. 6( a)-6(c). Depending on how tightly the operating temperatureis controlled, changes of as little as about 5° C. to about 10° C. canprovide an order of magnitude change in the coercive external magneticfield.

As a related issue, temperature control may be provided for the storagecell to more precisely define the hot and cold coercive fields, using,for example, the guidance of graphs such as those shown in FIGS. 6(a)-6(c). With more precise control of the operating temperature, lessheating would be required since the chip then could operate closer tothe compensation temperature where the rate of change of coercive fieldwith temperature increases.

Estimates of temperature rise depend on the materials used, and thespecific geometry of the MRAM cell. However, several simple modelsprovide temperature rises in the range of a few tens of degrees Celsiusfor micron-sized junctions, resistances of 1 K ohms and a voltage biasof 1 volt (V). The temperature rises further as dimensions in the memoryarray are shrunk, so that scalability is feasible.

The speed of the thermal selection process is also expected to be quiterapid. For example, other experiments on small geometries (e.g., seeWilliams et al., “Scanning Thermal Profiler,” Appl. Phys. Lett. 23, pp.1587-1589, incorporated herein by reference), have shown thermal timeconstants in some cases to be shorter than 1 nanosecond (ns). Asdiscussed in Mee et al., “Magnetic Recording Handbook,” McGraw-Hill, pp.540-580 (1989), the lateral diffusion time constant for heat topropagate in metallic films would be on the order of 1 ns. Hence, theselection process of heating a junction need not be the rate-limitingelement in an MRAM array.

In another embodiment, an integrated circuit is provided. As will beunderstood (e.g. from U.S. Pat. Nos. 5,650,958 and 5,640,343 issued toGallagher et al.) while not shown in FIGS. 5( a) and 5(b), the memorystorage device 58 of the memory array may be formed on a substrate, suchas a silicon substrate on which there may be included other circuitry toform an integrated circuit. The integrated circuit of the inventionincludes a memory storage device as described above.

Thus, a robust means is provided for choosing which memory storage cellare to be written, and for minimizing unintentional switching of otheradjacent cells in a memory array. Moreover, a potentially large changein coercivity is made possible, and hence a larger write select marginis provided. Additionally, with thermally-assisted switching, when thecell is not heated, the cold-state coercivity is large and unintentionalswitching is reduced. Thus, intrinsic cross-talk, as well as externalfields, are minimized, and shielding requirements are decreased, toresult in a smaller or more dense overall structure of MRAM arrays. Inaddition, by providing a heating layer that is separate from the cell tobe heated, the limitations on the resistivity of the cell are removed,thereby allowing further flexibility in cell manufacture.

While the invention has been described in terms of several preferredembodiments, those skilled in the art will recognize that the inventioncan be practiced with modifications, within the spirit and scope of theappended claims.

1-20. (canceled)
 21. A method of writing to a magnetic memory element,the method comprising: heating the memory element to a temperature to nomore than about 50 degree C. within the Blocking temperature of thememory element; and applying at least one magnetic field to the memoryelement.
 22. An information storage device comprising: an array ofmagnetic memory elements; and a plurality of heating elements for thememory elements, the heating elements raising the temperature ofselected memory elements by no more than about 50 degree C. within theBlocking temperature during write operations.
 23. A method of writing toa magnetic memory element, the method comprising: heating the memoryelement to a temperature to no more than a value within the Blockingtemperature of the memory element; applying at least one magnetic fieldto the memory element and said value being sufficient so that at leastone magnetic region of the memory element remains pinned at thetemperature the magnetic memory element is heated to and at the appliedfield.
 24. An information storage device comprising: an array ofmagnetic memory elements; and a plurality of heating elements for thememory elements, the heating elements raising the temperature ofselected memory elements by no more than a value within the Blockingtemperature during write operations, said value being sufficient so thatat least one magnetic region of the memory element remains pinned at thetemperature the magnetic memory element is heated to and at the appliedfield.